Description
The Liberty Elite 25-25 Automatic Batch Wafer Transfer System is designed to automatically transfer 25 wafers from a full 25 slot plastic/SiC/Quartz boat into an empty 25 slot plastic/SiC/Quartz boats or cassette.
Specifications
PART NUMBER: GAT-MHZN-425P5 (100mm)
GAT-MHZN-525P5 (125mm)
GAT-MHZN-625P5 (150mm)
GAT-MHZN-825P5 (200mm)
Power Requirements: 110-220 V.A.C. 50-60 Hertz
Standard Features
- PLC Control- Enhanced Design With Simplicity
- The machine can be configured to accommodate a large array of plastic, Teflon, Quartz, SiC, Poly-silicon & Metal Boats
- The systems transfer wafers with just a “Push of a button”
- The Liberty Elite systems are designed to limit particle contamination by using rod-less cylinders, along with “Clean-Room Grade” rails & bearings.
- The Liberty Elite systems utilize boat presence sensors to eliminate wafer breakage
- The Liberty Elite systems uses ramped speed controls for gentle pick up and return, thus ensuring the safer handling of your silicon wafers
- Retainer Holders default position is closed to prevent dropping of your product in the event of loss of power, or loss of air pressure.
- The system comes standard with a pause function. This function is provided to stop the lift system at any position for facility preventative maintenance and cleaning.
