Description
Liberty Elite Series also gave the ability to come in combination sized from 100mm, 150mm and 200mm configurations. These systems permit the transfer of two different size silicon wafers with only one wafer transfer tool.
Specifications
PART NUMBER: GAT-WFT-MHZN-46-25P5 (100mm & 150mm/25 Wafer)
GAT-WFT-MHZN-46-50P5 (100mm & 150mm/50 Wafer)
GAT-WFT-MHZN-68-25P5 (150mm & 200mm/25 Wafer)
GAT-WFT-MHZN-68-50P5 (150mm & 200mm/50 Wafer)
Power Requirements: 110-220 V.A.C. 50-60 Hertz
Standard Features
- 25-50 Wafer Transfer of Two Different Size Wafer on the Same System
- PLC Control- Enhanced Design With Simplicity
- The machine can be configured to accommodate a large array of plastic, Teflon, Quartz, SiC, Poly-silicon & Metal Boats
- The systems transfer wafers with just a “Push of a button”
- The Liberty Elite systems are designed to limit particle contamination by using rod-less cylinders, along with “Clean-Room Grade” rails & bearings.
- The Liberty Elite systems utilize boat presence sensors to eliminate wafer breakage
- The Liberty Elite systems uses ramped speed controls for gentle pick up and return, thus ensuring the safer handling of your silicon wafers
- Retainer Holders default position is closed to prevent dropping of your product in the event of loss of power, or loss of air pressure.
- The system comes standard with a pause function. This function is provided to stop the lift system at any position for facility preventative maintenance and cleaning.
