The G2 Automated Technologies, LLC- Sur-Lok™ & Sur-Lok II™ Self-Locking SiC Boat Handles are specially designed for the standard series of Norton Silicon Carbide ConGTAWuous Boats and Half-ConGTAWuous Boats. The handle incorporates LED indication of positive boat engagement and a quick lift and quick release mechanical movement to provide ease of use with high security.
The handle features a specially contoured self-locking mechanism that grips the boat in place. Securing the handle to the boat is as simple as sliding the handle under the edge of the boat and lifting gently. The locking mechanism pivots automatically, securing the boat to the handle. A button switch and LED indicate a positive grip. To release the boat, gently set the boat down and the locking mechanism will release and pivot out of the way. The Sur-Lok II™ series also incorporates a thumb lever for extra protection making it easier than ever to grip the boat.
The handle’s pistol grip is ergonomically designed to ensure a firm grip while reducing the risk of carpal-tunnel syndrome. The grip is available in four different colors (grey, red, white, and blue) to help operators differentiate between process types or other system restrictions. Grey is most typically used for LPCVD processes, while the other colors are generally used for Doped, Oxide, and Metal processes.
All components in direct contact with the process boats are made of your choice of either Vespel, Meldin 7001, or PEEK. The handle frame is made of electro-polished 316 stainless steel which provides a strong rigid support for the boat. The handle can easily support the weight of fifty 150mm silicon wafers with essentially no deflection. The design provides a handle that is highly maneuverable in the clean room and light weight for easy storage.
PART NUMBER: GAT-SIC-HANDLE-4 (100mm)
HANDLE-SL-6 (150mm w/LED Light)
- White PP Construction
- Semitron ESD
Common Wafer Boat /Carrier / Cassettes:
- SiC Carbide
- Plastic Cassettes
- Customer Design